EP 410 - Introduction to MEMS: Fabrication & Applications
- Credit Hours: 3R-3L-4C
- Term Available: S
- Graduate Studies Eligible: No
- Prerequisites: Junior or Senior class standing
- Corequisites: None
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Cross-listed with ME 416, ECE 416, and CHE405.